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對(duì)應(yīng)300mm Wafer的小型立式爐
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產(chǎn)品名稱(chēng):
對(duì)應(yīng)300mm Wafer的小型立式爐
產(chǎn)品型號(hào):
VF-5900
產(chǎn)品展商:
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簡(jiǎn)單介紹
對(duì)應(yīng)300mm Wafer的小型立式爐Large batch, Max 100 wafers batch processing
Max 16 FOUP stocksExcellent temperature control from low to medium high temperature range by use of LGO heater
對(duì)應(yīng)300mm Wafer的小型立式爐的詳細(xì)介紹
對(duì)應(yīng)300mm Wafer的小型立式爐:
Large batch, Max 100 wafers batch processing
Max 16 FOUP stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1250×D3200×H3400mm |
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| Heater | LGO heater(ID ø500mm) |
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| Flat zone length | 1040mm |
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| Wafer size | 300mm |
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| Batch size | 100wafers |
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| I/O port | 2 |
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| Number of FOUP stock | 16(standard) |
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| Finger | 5wafers+single wafer |
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| Controller | Model VSC1000 |
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| Option | Forced-cooling system, N2 load lock,
HOST communication(GEM300) |
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